Thermal CVD film-silicon on SiA1ON based ceramic substrates

AJMM Zutphen; A von Keitz; M Zeman; JW Metselaar

Thermal CVD film-silicon on SiA1ON based ceramic substrates

AJMM Zutphen, A von Keitz, M Zeman, JW Metselaar

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 10th workshop on circuits, systems and signal processing and the 2nd workshop on semiconductor advances for futere electronics
Editors	JP Veen
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	625-629
Number of pages	5
ISBN (Print)	90-37461-18-9
Publication status	Published - 1999
Event	ProRISC'99/SAFE'99, Mierlo - Utrecht Duration: 25 Nov 1999 → 26 Nov 1999

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	ProRISC'99/SAFE'99, Mierlo
Period	25/11/99 → 26/11/99

Keywords

ZX Int.klas.verslagjaar < 2002

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{9623f0cd8e9a4d0b9bb79f85488d4eae,

title = "Thermal CVD film-silicon on SiA1ON based ceramic substrates",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "AJMM Zutphen and {von Keitz}, A and M Zeman and JW Metselaar",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-37461-18-9",

publisher = "STW Technology Foundation",

pages = "625--629",

editor = "{JP Veen}",

booktitle = "Proceedings of the 10th workshop on circuits, systems and signal processing and the 2nd workshop on semiconductor advances for futere electronics",

note = "ProRISC'99/SAFE'99, Mierlo ; Conference date: 25-11-1999 Through 26-11-1999",

}

Zutphen, AJMM, von Keitz, A, Zeman, M & Metselaar, JW 1999, Thermal CVD film-silicon on SiA1ON based ceramic substrates. in JP Veen (ed.), Proceedings of the 10th workshop on circuits, systems and signal processing and the 2nd workshop on semiconductor advances for futere electronics. STW Technology Foundation, Utrecht, pp. 625-629, ProRISC'99/SAFE'99, Mierlo, 25/11/99.

Thermal CVD film-silicon on SiA1ON based ceramic substrates. / Zutphen, AJMM; von Keitz, A; Zeman, M et al.
Proceedings of the 10th workshop on circuits, systems and signal processing and the 2nd workshop on semiconductor advances for futere electronics. ed. / JP Veen. Utrecht: STW Technology Foundation, 1999. p. 625-629.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Thermal CVD film-silicon on SiA1ON based ceramic substrates

AU - Zutphen, AJMM

AU - von Keitz, A

AU - Zeman, M

AU - Metselaar, JW

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-37461-18-9

SP - 625

EP - 629

BT - Proceedings of the 10th workshop on circuits, systems and signal processing and the 2nd workshop on semiconductor advances for futere electronics

A2 - JP Veen, null

PB - STW Technology Foundation

CY - Utrecht

T2 - ProRISC'99/SAFE'99, Mierlo

Y2 - 25 November 1999 through 26 November 1999

ER -