Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements

DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationTransducers '99: digest of technical papers. Vol. 1
Place of PublicationTokyo
PublisherInstitute of Electrical Engineers of Japan
Pages310-313
Number of pages4
Publication statusPublished - 1999
Event10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan - Tokyo
Duration: 7 Jun 199910 Jun 1999

Publication series

Name
PublisherInstitute of Electrical Engineers of Japan

Conference

Conference10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan
Period7/06/9910/06/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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