Original language | Undefined/Unknown |
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Pages (from-to) | 335-339 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 332 |
Publication status | Published - 1998 |
TiN reactive sputter deposition studied as a function of the pumping speed
WM Heuvelman, P Helderman, GCAM Janssen, S Radelaar
Research output: Contribution to journal › Article › Scientific › peer-review
8
Citations
(Scopus)