TiN reactive sputter deposition studied as a function of the pumping speed

WM Heuvelman, P Helderman, GCAM Janssen, S Radelaar

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)335-339
    Number of pages5
    JournalThin Solid Films
    Volume332
    Publication statusPublished - 1998

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