Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 4549-4567 |
Number of pages | 19 |
Journal | Journal of Applied Physics |
Volume | 84 |
Issue number | 8 |
Publication status | Published - 1998 |
Trajectory displacement effect in particle projection Lithography systems - Modifications to the Extended Two-Particle Theory and Monte Carlo Simulation Technique
GH Jansen
Research output: Contribution to journal › Article › Scientific › peer-review
40
Citations
(Scopus)