Transamination in pulsed DC-plasma enhanced CVD of Ti(C,N) from TDMAT.

J Driessen, AD Kuypers, J Schoonman

    Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

    Original languageUndefined/Unknown
    Title of host publicationMat.Res.Soc.Symp.Proc.
    Pages183-188
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    Name
    Name
    Volume564

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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