Two novel MEMS actuator systems (a torsional one and a deflecting one) for a new self-aligned integrated 3D optical coherent tomography (OCT) scanner are reported. These new systems, with a footprint of 2.5mm×2.5 mm each, provide a χ and y scanning range of 730 μm (tilting range of 8°) with an average power consumption of 150 mW. As the device integrates a silicon collimating micro lens, an optical waveguide and a MEMS actuator system on a single chip, it provides a considerable decrease in optical losses thanks to the intrinsic alignment obtained during fabrication, while significantly reducing the complexity and time that assembly and packaging of separate components demand, therefore making fully integrated, miniaturized 3D OCT scanners feasible.

Original languageEnglish
Title of host publicationMEMS 2017
Subtitle of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
Publication statusPublished - 23 Feb 2017
EventMEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30


ConferenceMEMS 2017
Abbreviated titleIEEE MEMS 2017
CountryUnited States
CityLas Vegas, NV

    Research areas

  • Fasteners, Actuators, Micromechanical devices, Optical device fabrication, Silicon, Optical imaging, Lenses

ID: 29537071