@inproceedings{61149edabe9a469ab47fa688977d112f,
title = "Ultrashallow doping by excimer laser drive-in of RPCVD surface deposited arsenic monolayers",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "M Popadic and LK Nanver and C Biasotto and V Gonda and {van der Cingel}, J",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-1-4244-1950-0",
publisher = "IEEE Society",
pages = "141--146",
editor = "B Lojek",
booktitle = "16th IEEE international conference on advanced thermal processing of semiconductors",
note = "RTP 2008, Las Vegas, Nevada, USA ; Conference date: 30-09-2008 Through 03-10-2008",
}