Uniform illumination in SCALPEL by imaging the angular distribution.

D Moonen, MD Nijkerk, P Kruit, WK Waskiewicz

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of SPIE's 44th Annual Meeting, Charged Particle Optics IV.
    EditorsE Munro
    Pages7-14
    Number of pages8
    Publication statusPublished - 1999

    Publication series

    Name
    Name
    Volume3777

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