@inproceedings{6acb967f749a413880b7f8e7eece2f77,
title = "Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection",
keywords = "Conf.proc. > 3 pag",
author = "A Sakic and LK Nanver and {van Veen}, G and K Kooijman and P. Vogelsang and TLM Scholtes and {De Boer}, WB and WHA Wien and S Milosavljevic and CTH Heerkens and T Knezevic and I Spee",
year = "2010",
language = "English",
publisher = "IEEE Society",
pages = "1--4",
editor = "S.N.",
booktitle = "Proceedings 2010 IEEE International Electron Devices Meeting (IEDM)",
note = "International Electron Devices Meeting 2010, San Francisco, CA, USA ; Conference date: 06-12-2010 Through 08-12-2010",
}