Abstract
In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can bring the coupling efficiency in SiC waveguides to 80% (around 1 dB loss) or better from around 10% (10 dB loss) without taper. It further increases the alignment tolerance at the same time, which ensures the successful development of a plug-and-play solution for optical sensing. This is the first reported taper made in SiC.
Original language | English |
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Pages (from-to) | 661-663 |
Number of pages | 3 |
Journal | Electronics Letters |
Volume | 55 |
Issue number | 11 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- silicon compounds
- optical waveguidess
- etching
- optical fabricationr
- optical couplers
- silicon
- elemental semiconductors
- integrated optics
- wide band gap semiconductors