In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can bring the coupling efficiency in SiC waveguides to 80% (around 1 dB loss) or better from around 10% (10 dB loss) without taper. It further increases the alignment tolerance at the same time, which ensures the successful development of a plug-and-play solution for optical sensing. This is the first reported taper made in SiC.

Original languageEnglish
Pages (from-to)661-663
Number of pages3
JournalElectronics Letters
Issue number11
Publication statusPublished - 2019

    Research areas

  • silicon compounds, optical waveguidess, etching, optical fabricationr, optical couplers, silicon, elemental semiconductors, integrated optics, wide band gap semiconductors

ID: 54441168