@inproceedings{c16e6cb4f70c4511840a74b735d5042f,
title = "Wafer Level Encapsulation Techniques for a MEMS Microreactor with integrated Heat Exchanger",
author = "F Santagata and L Mele and M Mihailovic and B Morana and JF Creemer and PM Sarro",
year = "2009",
language = "English",
isbn = "978-1-4244-5225-1",
pages = "799--802",
booktitle = "Proceedings of IEEE Sensors 2009 Conference",
publisher = "IEEE Society",
note = "IEEE Sensors 2009 Conference ; Conference date: 25-10-2009 Through 28-10-2009",
}