%PDF-1.7
%
1 0 obj
<<
/Lang (EN)
/MarkInfo <<
/Marked true
>>
/Metadata 2 0 R
/Names 3 0 R
/OpenAction [4 0 R /FitH 910]
/Outlines 5 0 R
/PageLabels 6 0 R
/PageLayout /SinglePage
/PageMode /UseOutlines
/Pages 7 0 R
/StructTreeRoot 8 0 R
/Threads [9 0 R]
/Type /Catalog
>>
endobj
10 0 obj
<<
/Author (A. Gkouzou)
/CreationDate (D:20200207123138Z)
/Creator (Elsevier)
/CrossMarkDomains#5B1#5D (sciencedirect.com)
/CrossMarkDomains#5B2#5D (elsevier.com)
/CrossmarkDomainExclusive (true)
/CrossmarkMajorVersionDate (2010-04-23)
/ElsevierWebPDFSpecifications (6.5)
/Keywords ()
/ModDate (D:20200303161120+01'00')
/Producer (Acrobat Distiller 11.0 \(Windows\))
/Subject (Sensors & Actuators: A. Physical, 303 \(2020\) 111837. doi:10.1016/j.sna.2020.111837)
/Title (Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces)
/Trapped /True
/doi (10.1016/j.sna.2020.111837)
/robots (noindex)
>>
endobj
2 0 obj
<<
/Length 7219
/Subtype /XML
/Type /Metadata
>>
stream
application/pdf
10.1016/j.sna.2020.111837
Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces
A. Gkouzou
G.C.A.M. Janssen
W.M. van Spengen
Graphene
Chemical vapor deposition
Carbon precipitation
MEMS
Thermal time response
Micro-Raman spectroscopy
Sensors & Actuators: A. Physical, 303 (2020) 111837. doi:10.1016/j.sna.2020.111837
Elsevier B.V.
journal
Sensors & Actuators: A. Physical
© 2020 The Authors. Published by Elsevier B.V.
0924-4247
303
1 March 2020
2020-03-01
111837
111837
10.1016/j.sna.2020.111837
https://doi.org/10.1016/j.sna.2020.111837
2010-04-23
true
10.1016/j.sna.2020.111837
elsevier.com
sciencedirect.com
VoR
10.1016/j.sna.2020.111837
noindex
2010-04-23
true
sciencedirect.com
elsevier.com
6.5
sciencedirect.com
elsevier.com
Elsevier
2020-02-07T12:31:38Z
2020-03-03T16:11:20+01:00
2020-03-03T16:11:20+01:00
True
True
Acrobat Distiller 11.0 (Windows)
uuid:b3e41670-6e7d-4b96-b21b-7db7d58203b3
uuid:e0739076-b215-4342-91ef-979e30bc55d7
http://creativecommons.org/licenses/by-nc-nd/4.0/
endstream
endobj
3 0 obj
<<
/Dests 11 0 R
>>
endobj
4 0 obj
<<
/Annots [12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R 20 0 R 21 0 R
22 0 R 23 0 R 24 0 R 25 0 R 26 0 R 27 0 R 28 0 R 29 0 R 30 0 R 31 0 R
32 0 R 33 0 R 34 0 R 35 0 R 36 0 R 37 0 R 38 0 R 39 0 R 40 0 R 41 0 R
42 0 R 43 0 R 44 0 R 45 0 R 46 0 R 47 0 R 48 0 R 49 0 R 50 0 R 51 0 R
52 0 R 53 0 R 54 0 R 55 0 R]
/B [56 0 R 57 0 R 58 0 R]
/BleedBox [33.4 38 645.68 848.7]
/Contents [59 0 R 60 0 R 61 0 R 62 0 R 63 0 R 64 0 R 65 0 R 66 0 R]
/CropBox [41.9 46.5 637.18 840.2]
/MediaBox [33.4 38 645.68 848.7]
/Parent 67 0 R
/Resources 68 0 R
/Rotate 0
/StructParents 1
/Tabs /S
/TrimBox [41.9 46.5 637.18 840.2]
/Type /Page
>>
endobj
5 0 obj
<<
/Count 22
/First 69 0 R
/Last 70 0 R
>>
endobj
6 0 obj
<<
/Nums [0 71 0 R]
>>
endobj
7 0 obj
<<
/Count 12
/Kids [67 0 R 72 0 R]
/Type /Pages
>>
endobj
8 0 obj
<<
/K [73 0 R 74 0 R 75 0 R 76 0 R 77 0 R 78 0 R 79 0 R 80 0 R 81 0 R 82 0 R
83 0 R 84 0 R 85 0 R 86 0 R 87 0 R 88 0 R 89 0 R 90 0 R 91 0 R 92 0 R
93 0 R 94 0 R 95 0 R 96 0 R 97 0 R 98 0 R 99 0 R 100 0 R 101 0 R 102 0 R
103 0 R 104 0 R 105 0 R 106 0 R 107 0 R 108 0 R 109 0 R 110 0 R 111 0 R 112 0 R
113 0 R 114 0 R 115 0 R 116 0 R 117 0 R 118 0 R 119 0 R 120 0 R 121 0 R 122 0 R
123 0 R 124 0 R 125 0 R 126 0 R 127 0 R 128 0 R 129 0 R 130 0 R 131 0 R 132 0 R
133 0 R 134 0 R 135 0 R 136 0 R 137 0 R 138 0 R 139 0 R 140 0 R 141 0 R 142 0 R
143 0 R 144 0 R 145 0 R 146 0 R 147 0 R 148 0 R 149 0 R 150 0 R 151 0 R 152 0 R
153 0 R 154 0 R 155 0 R 156 0 R 157 0 R 158 0 R 159 0 R 160 0 R 161 0 R 162 0 R
163 0 R]
/ParentTree 164 0 R
/ParentTreeNextKey 12
/Type /StructTreeRoot
>>
endobj
9 0 obj
<<
/F 56 0 R
/I <<
/Title (PDFThreading)
>>
>>
endobj
11 0 obj
<<
/Kids [165 0 R 166 0 R]
>>
endobj
12 0 obj
<<
/A <<
/S /URI
/URI (https://doi.org/10.1016/j.sna.2020.111837)
>>
/Border [0 0 0]
/F 4
/Rect [278.541 798.113 411.769 803.137]
/Subtype /Link
/Type /Annot
>>
endobj
13 0 obj
<<
/A <<
/S /URI
/URI (http://www.sciencedirect.com/science/journal/09244247)
>>
/Border [0 0 0]
/F 4
/Rect [370.2 771.114 421.416 777.012]
/Subtype /Link
/Type /Annot
>>
endobj
14 0 obj
<<
/A <<
/S /URI
/URI (http://www.elsevier.com/locate/sna)
>>
/Border [0 0 0]
/F 4
/Rect [324.978 715.423 461.156 721.178]
/Subtype /Link
/Type /Annot
>>
endobj
15 0 obj
<<
/A <<
/S /URI
/URI (http://crossmark.crossref.org/dialog/?doi=10.1016/j.sna.2020.111837&domain=pdf)
>>
/Border [0 0 0]
/F 4
/Rect [549.281 645.61 605.678 674.61]
/Subtype /Link
/Type /Annot
>>
endobj
16 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837AFF0005)
/F 4
/Rect [143.408 627.071 162.228 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
17 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837AFF0010)
/F 4
/Rect [150.327 627.071 169.147 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
18 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837COR0005)
/F 4
/Rect [157.712 627.071 176.532 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
19 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837AFF0005)
/F 4
/Rect [251.674 627.071 270.494 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
20 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837AFF0005)
/F 4
/Rect [356.689 627.071 375.508 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
21 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837AFF0015)
/F 4
/Rect [363.608 627.071 382.427 633.925]
/Subtype /Link
/Type /Annot
>>
endobj
22 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [425.024 403.959 447.447 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
23 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [447.447 403.959 510.319 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
24 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [510.319 403.959 524.278 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
25 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [524.278 403.959 553.967 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
26 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [553.967 403.959 565.437 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
27 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [565.437 403.959 576.591 407.911]
/Subtype /Link
/Type /Annot
>>
endobj
28 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [576.591 403.959 588.176 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
29 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [588.176 403.959 594.244 409.296]
/Subtype /Link
/Type /Annot
>>
endobj
30 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [594.244 403.959 601.173 409.611]
/Subtype /Link
/Type /Annot
>>
endobj
31 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [601.173 403.959 601.173 403.959]
/Subtype /Link
/Type /Annot
>>
endobj
32 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0005)
/F 4
/Rect [137.069 314.219 146.848 320.149]
/Subtype /Link
/Type /Annot
>>
endobj
33 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0010)
/F 4
/Rect [274.947 293.298 284.726 299.228]
/Subtype /Link
/Type /Annot
>>
endobj
34 0 obj
<<
/A <<
/S /URI
/URI (mailto:a.gkouzou@tudelft.nl)
>>
/Border [0 0 0]
/F 4
/Rect [143.677 132.908 208.063 137.932]
/Subtype /Link
/Type /Annot
>>
endobj
35 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0015)
/F 4
/Rect [560.18 356.063 569.959 361.992]
/Subtype /Link
/Type /Annot
>>
endobj
36 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0020)
/F 4
/Rect [566.914 356.063 576.693 361.992]
/Subtype /Link
/Type /Annot
>>
endobj
37 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0025)
/F 4
/Rect [595.935 324.68 605.714 330.53]
/Subtype /Link
/Type /Annot
>>
endobj
38 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0030)
/F 4
/Rect [519.109 303.759 538.485 309.688]
/Subtype /Link
/Type /Annot
>>
endobj
39 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0045)
/F 4
/Rect [357.11 293.298 366.889 299.228]
/Subtype /Link
/Type /Annot
>>
endobj
40 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0050)
/F 4
/Rect [363.844 293.298 378.406 299.228]
/Subtype /Link
/Type /Annot
>>
endobj
41 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0055)
/F 4
/Rect [446.449 272.376 461.027 278.306]
/Subtype /Link
/Type /Annot
>>
endobj
42 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0060)
/F 4
/Rect [357.11 240.994 371.687 246.924]
/Subtype /Link
/Type /Annot
>>
endobj
43 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0065)
/F 4
/Rect [529.161 188.69 543.739 194.62]
/Subtype /Link
/Type /Annot
>>
endobj
44 0 obj
<<
/Border [0 0 0]
/Dest (SNA111837BIB0070)
/F 4
/Rect [544.801 146.847 559.379 152.777]
/Subtype /Link
/Type /Annot
>>
endobj
45 0 obj
<<
/A <<
/S /URI
/URI (https://doi.org/10.1016/j.sna.2020.111837)
>>
/Border [0 0 0]
/F 4
/Rect [84.632 114.753 213.543 119.777]
/Subtype /Link
/Type /Annot
>>
endobj
46 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [455.242 106.185 475.174 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
47 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [475.174 106.185 531.06 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
48 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [531.06 106.185 543.468 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
49 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [543.468 106.185 569.858 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
50 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [569.858 106.185 580.054 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
51 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [580.054 106.185 589.968 109.698]
/Subtype /Link
/Type /Annot
>>
endobj
52 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [589.968 106.185 600.266 111.209]
/Subtype /Link
/Type /Annot
>>
endobj
53 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [600.266 106.185 605.66 110.929]
/Subtype /Link
/Type /Annot
>>
endobj
54 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [84.632 97.617 90.791 102.641]
/Subtype /Link
/Type /Annot
>>
endobj
55 0 obj
<<
/A <<
/S /URI
/URI (http://creativecommons.org/licenses/by-nc-nd/4.0/)
>>
/Border [0 0 0]
/F 4
/Rect [90.791 97.617 90.791 97.617]
/Subtype /Link
/Type /Annot
>>
endobj
56 0 obj
<<
/N 57 0 R
/P 4 0 R
/R [85 425 606 813]
/T 9 0 R
/V 167 0 R
>>
endobj
57 0 obj
<<
/N 58 0 R
/P 4 0 R
/R [85 178 336 373]
/T 9 0 R
/V 56 0 R
>>
endobj
58 0 obj
<<
/N 168 0 R
/P 4 0 R
/R [354 133 606 373]
/T 9 0 R
/V 57 0 R
>>
endobj
59 0 obj
<<
/Length 5253
/Filter /FlateDecode
>>
stream
HW]oG|_F= @b;Arp܃fl("1ߧ{dB ,g{x+NߞM,Sq=2r}9.0R|۳5}V6W7h0{[F/*6WYO.:ze\oyWRHo}p~x|)KQDZ|G.>?ͯţ7,lK(>}y}/+Nmi0!I
eo ;/egWaסWoZE'V,DR3__mnG]Ц%L|_WWȡ푮jIʃp<؞WZOrxzQnJV{PV^nTz`ճWzf{ُ̪DSY#\so×@-f90.uq 9LHޗ'ey
LҊ9'