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IOP Publishing
2020-04-02T6:21
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Measurement Science and Technology, 31 (2020) 064007 doi: 10.1088/1361-6501/ab7063
focus determination
sensitive method
nanoparticle at surface
coherent Fourier scatterometry
A highly sensitive laser focus positioning method with sub-micrometre accuracy using coherent Fourier scatterometry
Dmytro Kolenov ,Peiwen Meng ,Silvania Pereira
iop.org
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